【目的】针对高速高精度振镜电机传统位置-速度-电流三环控制系统存在的轨迹跟踪精度低、动态响应慢及参数整定难等问题，本文提出了一种时滞条件下基于超前校正的位置-电流双环伺服控制策略。【方法】首先，对传统三环结构的局限性与双环机理进行了分析，证明了比例积分超前(PI-Lead)控制器对双环稳定性的改善作用；其次，研究了时滞引起的相位损失对轨迹跟踪精度和瞬态响应速度的影响，并提出了一种时滞补偿型比例积分超前(PI-Lead-TDC)控制器，通过该控制器对时滞引起的相位损失进行了补偿。最后，提出一种闭环频域参数整定策略，由理论范式设计频域参数，提高参数整定速度。【结果】试验结果表明，与传统三环控制系统相比，所提双环控制系统的正弦轨迹跟踪均方根误差明显降低。此外，对于1%行程的阶跃指令，响应速度提升了20%。【结论】较传统三环控制系统，所提基于PI-Lead-TDC的双环控制系统可实现更高的轨迹跟踪精度、更快的动态响应速度以及更高效简单的参数整定过程。

[Objective] To address the issues of low trajectory tracking accuracy, slow dynamic response, and difficult parameter tuning inherent in traditional position-speed-current triple-loop control system for high-speed, high-precision galvanometer motors, this paper proposes a position-current dual-loop servo control strategy based on lead correction under time-delay conditions. [Methods] Firstly, the limitations of the traditional triple-loop architecture and the operating mechanism of the dual-loop scheme were analyzed, and the stabilizing effect of the proportional-integral-lead (PI-Lead) controller on the dual-loop system was demonstrated. Secondly, the impact of phase loss caused by time-delay on trajectory tracking accuracy and transient response speed was investigated. A time-delay-compensated PI-Lead (PI-Lead-TDC) controller was proposed to compensate for the phase loss induced by delay. Finally, a closed-loop frequency-domain parameter tuning strategy was proposed, wherein frequency-domain parameters were designed based on theoretical paradigms to enhance parameter tuning speed. [Results] Experimental results showed that, compared to the traditional triple-loop control system, the proposed dual-loop control system exhibited a significantly reduced root mean square error in sinusoidal trajectory tracking. Furthermore, for a 1% stroke step command, the response speed was improved by 20%. [Conclusion] Compared to traditional triple-loop control system, the proposed dual-loop control system based on PI-Lead-TDC achieves higher trajectory tracking accuracy, faster dynamic response speed, and a more efficient and simplified parameter tuning process.

国家自然科学基金(52307072);福建科技计划-STS院省合作项目(2023T3046,2023T3015);稀土新材料技术创新中心支持项目(CXZX-D-202402-0013)