Taking the high precision linear motor as the research objecta method for thrust ripple compensation of linear motor is proposed. The general law of detent force of linear motor is analyzed and summarized by analytical methodwhich provides a theoretical basis for rationally setting compensator parameters and suppressing linear motor thrust ripple. Finallythe finite element analysis and experiment of 6-slot 8-pole motor is carried out. The results show that the compensation effect of the compensator on the detent force is over 60%.